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所属单位：机电学院

发表刊物：THIN SOLID FILMS

关键字：cBN films ALLIS assisted RFMS ALLIS power Film composition Growth rate Mechanical properties

摘要：Anode Layer Linear Ion Source (ALLIS) can improve the ionization rate of working gases and enhance the activity of gas molecules. In the present work, the ALLIS assisted Radio Frequency Magnetron Sputtering (RFMS) method was proposed to deposit cubic boron nitride (cBN) films, and the effect of ALLIS on the microstructure and mechanical properties of the deposited cBN films was investigated. The phase component, chemical composition, bonding states, surface topography, deposition rate and nanohardness of the cBN films were characterized respectively by Fourier transformed infrared spectroscopy, X-ray photoelectron spectroscopy, scanning electron microscopy and nanoindentation. The results indicated that the sp(3) phase content in cBN films increased at first and then decreased with the increase of ALLIS power, and the maximum value was 83% when the ALLIS power was 200 W, the surface quality and growth rate of cBN films were enhanced markedly. The hardness and elastic modulus exhibited the same trend to variation of cubic phase content. Finally, the effect of ALLIS on the cBN synthesis was discussed systematically.

ISSN号：0040-6090

是否译文：否

发表时间：2018-05-01

合写作者：田帅,叶鹏,吴金鑫,邹友生,左敦稳

通讯作者：徐锋