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所属单位：机电学院

发表刊物：SURFACE & COATINGS TECHNOLOGY

关键字：Anode layer linear ion source Amorphous carbon nitride films RFMS Microstructure Mechanical properties

摘要：In order to study the effects of anode layer linear ion source(ALLIS)on the microstructure and mechanical properties of amorphous carbon nitride (a-CNx) films, a-CNx films were deposited by the ALLIS assisted radio frequency magnetron sputtering (RFMS) deposition condition changing the ion source power from 0 to 200 W. The growth rate, structural morphology, surface roughness, nanohardness as well as the bonding states of deposited a-CNx films were characterized by scanning electron microscope (SEM), atomic force microscope (AFM), nano indentation, Raman spectroscopy and X-ray photoelectron spectroscopy (XPS), respectively. The H/E and hardness increased relatively with increasing the ion source power up to 100-W. From the Micro Raman analysis, the content of sp(3) carbon in sp(3)/sp(2) ratio was increased with increasing the ion source power. The cross-sectional SEM images demonstrated that the ion source enhanced the growth rate of a-CNx films. Meanwhile, the roughness was increased with the ion source power above 100 W. Therefore, the optimum ion source power is considered to be around 100 W in these experimental conditions. (C) 2017 Elsevier B.V. All rights reserved.

ISSN号：0257-8972

是否译文：否

发表时间：2017-06-25

合写作者：叶鹏,吴金鑫,田帅,赵先锐,唐晓龙,左敦稳

通讯作者：徐锋,左敦稳,徐锋