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Ligeng Wang,Hangying Zhang*,Kai Meng,et al..Robust three-frame random phase-shifting interferometry based on dynamic mode decomposition method,.[J]:Optics express,2025,33(22):47204-47217.
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Weihao Zhang,Hangying Zhang*,Kai Meng, et al..Spectrally resolved interferometry based on a tilt phase-shifting iteration method.[J]:Optics Letters,2025,50(9):2982-2985.
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Leisheng Chen,,Kai Meng,Hangying Zhang,et al..SR-FABNet: Super-Resolution branch guided Fourier attention detection network for efficient optical inspection of nanoscale wafer defects.[J]:Advanced Engineering Informatics,2025,65(3):103200.
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Weihao Zhang,Hangying Zhang*,Kai Meng, et al..Precise and efficient spectrally resolved interferometry for profile measurement.[J]:Optics & Laser Technology,2025,190:113270.
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杨金,张航瑛*,孟凯,楼佩煌.晶圆定位标记光学成像的自适应聚焦评价.[J]:光学 精密工程,2025,33(3):389-401.
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Kai Meng,Daiyi Hu,Kai Wang,Hangying Zhang*,et al..Optimized overlay metrology based on polarization eigenstate of Mueller matrix.[J]:Optics Express,2025,33(6):13358-13375.
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Weihao Zhang,Hangying Zhang*,Boyu Wang, et al..Efficient white light interferometry for wafer‑scale high aspect ratio structures.[J]:Measurement,2025,255:117988.
