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连续批量制备金刚石膜的制备系统

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Scope of patent:中国专利

School Sign:南京航空航天大学

Type of Patent:Utility models

State of Patent:无权

Application Number:CN200520076376.7

Service Invention or Not:no

Application Date:2005-10-14

Publication Date:2006-10-18

Authorization Date:2006-10-18

Document Type:DOCUMENTTYPE_ID139324

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