Current position: Home >> Scientific Research >> Patents

能多面沉积CVD金刚石膜的高热阻镂空衬底工作台及其应用

Hits:

Scope of patent:中国专利

School Sign:南京航空航天大学

Type of Patent:Invent

State of Patent:无权

Application Number:CN200810019558.9

Service Invention or Not:no

Application Date:2008-01-25

Publication Date:2008-07-16

Authorization Date:2009-07-22

Document Type:DOCUMENTTYPE_ID139324

Pre One:硬质合金表面沉积CVD金刚石膜的梯度法预处理工艺

Next One:连续批量制备金刚石膜的制备系统