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Affiliation of Author(s):机电学院

Title of Paper:Effects of anode layer linear ion source on the microstructure and mechanical properties of amorphous carbon nitride films

Journal:SURFACE & COATINGS TECHNOLOGY

Key Words:Anode layer linear ion source Amorphous carbon nitride films RFMS Microstructure Mechanical properties

Abstract:In order to study the effects of anode layer linear ion source(ALLIS)on the microstructure and mechanical properties of amorphous carbon nitride (a-CNx) films, a-CNx films were deposited by the ALLIS assisted radio frequency magnetron sputtering (RFMS) deposition condition changing the ion source power from 0 to 200 W. The growth rate, structural morphology, surface roughness, nanohardness as well as the bonding states of deposited a-CNx films were characterized by scanning electron microscope (SEM), atomic force microscope (AFM), nano indentation, Raman spectroscopy and X-ray photoelectron spectroscopy (XPS), respectively. The H/E and hardness increased relatively with increasing the ion source power up to 100-W. From the Micro Raman analysis, the content of sp(3) carbon in sp(3)/sp(2) ratio was increased with increasing the ion source power. The cross-sectional SEM images demonstrated that the ion source enhanced the growth rate of a-CNx films. Meanwhile, the roughness was increased with the ion source power above 100 W. Therefore, the optimum ion source power is considered to be around 100 W in these experimental conditions. (C) 2017 Elsevier B.V. All rights reserved.

ISSN No.:0257-8972

Translation or Not:no

Date of Publication:2017-06-25

Co-author:叶鹏,吴金鑫,田帅,赵先锐,唐晓龙,zdw

Correspondence Author:徐锋,左敦稳,XU Feng