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  • 博士生导师
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  • 所在单位:材料科学与技术学院
  • 职务:江苏省能量转换材料与技术重点实验室副主任
  • 学历:博士研究生毕业
  • 办公地点:南京航空航天大学将军路校区西区材料学院大楼D10-B317
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  • 联系方式:18913854729
  • 学位:理学博士学位
  • 职称:研究员
  • 主要任职:江苏省真空学会常务理事-江苏省光伏科学与工程协同创新中心副理事长-南京市可再生能源学会副理事长
  • 其他任职:亚太材料科学院院士 (2013年10月)
  • 毕业院校:中国科学院上海冶金研究所
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Effect of deposition pressure on the properties of amorphous carbon films by hot-filament chemical vapor deposition
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  • 所属单位:材料科学与技术学院
  • 发表刊物:JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
  • 关键字:DIAMOND-LIKE CARBON ELECTRICAL-PROPERTIES GAS-PRESSURE THIN-FILMS SUBSTRATE GROWTH CVD TEMPERATURE GRAPHENE VOLTAGE
  • 摘要:Deposition pressure is an important factor for the preparation of amorphous carbon (a-C) films through vacuum method. However, researches about the properties, especially optical and electrical properties of a-C films influenced by deposition pressure are still rare. In this work, hot-filament chemical vapor deposition (HFCVD) was used to deposit conductive a-C films under different deposition pressure conditions. As deposition pressure raised from 5 to 160Pa, a structural transition from a-C to nanocrystalline graphite that led to the increase of cluster size, sp(2) content and crystalline quality of a-C films was observed. The hybrid structure composed of amorphous and nanocrystalline phases was also revealed by high-resolution transmittance electron microscope. The mobility, transmittance and conductivity of films increased while the optical gap and carrier concentration decreased by elevating the deposition pressure. As a result, a-C films prepared at 160Pa showed the best property with a roughness of 0.412nm, a transmittance of 67%, an optical bandgap of 1.25eV, a resistivity of 75m and a mobility of 3.17cm(2) V-1 s(-1), which is comparable to those prepared through other methods. The small roughness, good transmittance and low resistivity implied that high quality a-C films can be prepared through HFCVD method by adjusting the deposition pressure.
  • ISSN号:0957-4522
  • 是否译文:
  • 发表时间:2019-06-01
  • 合写作者:Zhai, Zihao,Chen, Jieyi,F70206594
  • 通讯作者:沈鸿烈
  • 发表时间:2019-06-01