Impact Factor:2.012
DOI number:10.1007/s00542-019-04743-2
Journal:Microsystem Technologies
Discipline:Engineering
Document Type:J
Volume:26
Issue:6
Page Number:1905-1914
ISSN No.:0946-7076
Translation or Not:no
Included Journals:SCI
Co-author:Changwen Wu
Correspondence Author:Yuchuan Zhu