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个人信息Personal Information
副教授 硕士生导师
招生学科专业：
机械工程 -- 【招收硕士研究生】 -- 机电学院
航空宇航科学与技术 -- 【招收硕士研究生】 -- 机电学院
机械 -- 【招收硕士研究生】 -- 机电学院
主要任职：副教授
性别：男
毕业院校：哈尔滨工业大学/香港理工大学
学历：哈尔滨工业大学
学位：工学博士学位
所在单位：机电学院
办公地点：15A-337
联系方式：18260088356
电子邮箱：
Surface damage mechanism of monocrystalline silicon during single point diamond grinding
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所属单位：机电学院
发表刊物：WEAR
关键字：Single point diamond grinding Monocrystalline Si Tribochemistry Phase transformation
摘要：Surface damage mechanism of single crystalline Si (100) under single point diamond grinding was investigated in the present study. The result, for the first time, showed that the ductile and brittle material removal appeared at different grinding positions of the diamond wheel due to the varied kinematics of the diamond grits in the cylindrical face and end face. Under the dynamic pressure of the diamond grits, amorphization and the transformation to high pressure phases (Si-III and Si-XI) of Si occurred, which were identified by both XRD and Raman spectroscopy. In addition, surface oxidation and chemical reaction between the Si, O, C and N atoms was analyzed by the XPS, and the new products of Si3N4 and graphite oxide (GO) are firstly proposed to be the surface damage of Si and the tool wear mechanism during the ultra-precision machining process.
ISSN号：0043-1648
是否译文：否
发表时间：2018-02-15
合写作者：傅玉灿,苏宏华,Zhao, Qingliang,To, Suet
通讯作者：张全利