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一种多炬等离子体喷射CVD法沉积超硬膜的方法及装置

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Scope of patent:中国专利

School Sign:南京航空航天大学

Type of Patent:Invent

State of Patent:无权

Application Number:CN201210114255.1

Service Invention or Not:no

Application Date:2012-04-18

Publication Date:2012-08-01

Authorization Date:2014-04-09

Document Type:DOCUMENTTYPE_ID139324

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