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所属单位:航空学院
发表刊物:Proc. Symp. Piezoelectricity, Acoust. Waves, Dev. Appl., SPAWDA
摘要:A design of ring electrode deposited on a rectangular ZnO thin film is proposed in this paper to demonstrate the existence of a nearly uniform displacement distribution at the central part of this kind of resonators. A variational formulation constructed based on a scalar equation provides a theoretical basis for Ritz method in our analysis. The mode shapes of the fundamental thickness-stretch mode of this ring-electroded resonator are obtained. The structural parameters of the ring electrode are optimized in order to achieve a relatively flat vibration region, which guarantees a higher accuracy and repeatable measurement for sensing detection in an air or liquid environment. These results can provide a fundamental reference of the design and optimization of structural parameters of a high quality sensor. © 2017 IEEE.
是否译文:否
发表时间:2018-04-17
合写作者:赵梓楠,钱征华
通讯作者:王彬,钱征华