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所属单位：航空学院
发表刊物：ACTA MECHANICA SOLIDA SINICA
关键字：FBARs Elastic electrode Waves propagation Dispersion curves Inertial electrode
摘要：Wave propagation in a piezoelectric layered structure of a film bulk acoustic resonator (FBAR) is studied. The accurate results of dispersion relation are calculated using the proposed elastic electrode model for both electroded and unelectroded layered plates. The differences of calculated cut-off frequencies between the current elastic electrode model and the simplified inertial electrode model (often used in the quartz resonator analysis) are illustrated in detail, which shows that an elastic electrode model is indeed needed for the accurate analysis of FBAR. These results can be used as an accurate criterion to calibrate the 2-D theoretical model for a real finite-size structure of FBAR. (C) 2017 Published by Elsevier Ltd on behalf of Chinese Society of Theoretical and Applied Mechanics.
ISSN号：0894-9166
是否译文：否
发表时间：2017-06-01
合写作者：朱峰,张雨杏,钱征华
通讯作者：王彬,钱征华