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个人信息Personal Information
教授 博士生导师
招生学科专业：
机械工程 -- 【招收博士、硕士研究生】 -- 机电学院
航空宇航科学与技术 -- 【招收硕士研究生】 -- 机电学院
机械 -- 【招收博士、硕士研究生】 -- 机电学院
性别：男
毕业院校：中国科学院理化技术研究所
学历：博士研究生毕业
学位：理学博士学位
所在单位：机电学院
办公地点：机电学院15-353。
电子邮箱：
Effect of FAP characteristics on fixed abrasive polishing of CaF2 crystal
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所属单位：机电学院
发表刊物：Int. J. Nanomanufacturing
摘要：Pad is an important factor, which bears pressure to mechanically remove material in chemical mechanical polishing process. Owing to the abrasives fixed in pad, fixed abrasive pad (FAP) becomes more important and influences material removal and surface quality of wafer. The characteristics of FAP, abrasive type, particle size and matrix hardness, were analysed and the effect on material removal rate (MRR) and surface quality was investigated in fixed abrasive polishing of CaF2 crystal. The results indicated that FAP with 3-5 µm diamond abrasive and soft matrix is suited to polish CaF2 crystal. And the better surface quality with surface roughness Sa 7.27 nm and material removal rate 192 nm/min, can be achieved in fixed abrasive polishing of CaF2 crystal. Copyright © 2019 Inderscience Enterprises Ltd.
ISSN号：1746-9392
是否译文：否
发表时间：2019-01-01
合写作者：Tang, Yongkai,Song, Longlong,朱永伟,左敦稳
通讯作者：李军