Language : English
张航瑛

Paper Publications

SR-FABNet: Super-Resolution branch guided Fourier attention detection network for efficient optical inspection of nanoscale wafer defects

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Journal:Advanced Engineering Informatics

Indexed by:Journal paper

Document Code:9

Discipline:Engineering

Document Type:J

Volume:65

Issue:3

Page Number:103200.

Translation or Not:no

Date of Publication:2025-05-01

Included Journals:SCI

Co-author:Kai Meng,Hangying Zhang,et al.

First Author:Leisheng Chen