Language : English
张航瑛

Paper Publications

Neural network driven sensitivity analysis of diffraction-based overlay metrology performance to target defect features

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Journal:Measurement Science and Technology

Indexed by:Journal paper

Document Code:8

Discipline:Engineering

Document Type:J

Volume:35

Page Number:095201.

Translation or Not:no

Date of Publication:2024-06-03

Included Journals:SCI

First Author:Kai Wang

Correspondence Author:Kai Meng*,Hangying Zhang*,et al.