Hits:

Journal:Optics Letters

Indexed by:Journal paper

Document Code:7

Discipline:Engineering

Document Type:J

Volume:49

Issue:19

Page Number:5615-5618.

Translation or Not:no

Date of Publication:2024-09-30

Included Journals:SCI

Co-author:Weihao Zhang,Kai Meng,et al.

First Author:Hangying Zhang

Pre One:Efficient white light interferometry for wafer‑scale high aspect ratio structures Next One:Neural network driven sensitivity analysis of diffraction-based overlay metrology performance to target defect features