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Journal:Optics Express

Indexed by:Journal paper

Document Code:6

Discipline:Engineering

Document Type:J

Volume:32

Issue:12

Page Number:21017-21027.

Translation or Not:no

Date of Publication:2024-05-22

Included Journals:SCI

Co-author:Peihuang Lou

First Author:Hangying Zhang

Correspondence Author:Kai Meng

Pre One:Neural network driven sensitivity analysis of diffraction-based overlay metrology performance to target defect features