Language : English
张航瑛

Paper Publications

Optimized overlay metrology based on polarization eigenstate of Mueller matrix

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Journal:Optics Express

Indexed by:Journal paper

Document Code:5

Discipline:Engineering

Document Type:J

Volume:33

Issue:6

Page Number:13358-13375.

Translation or Not:no

Date of Publication:2025-02-19

Included Journals:SCI

First Author:Kai Meng

Correspondence Author:Daiyi Hu,Kai Wang,Hangying Zhang*,et al.