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Journal:光学 精密工程

Indexed by:Journal paper

Document Code:4

Discipline:Engineering

Document Type:J

Volume:33

Issue:3

Page Number:389-401.

Translation or Not:no

Date of Publication:2025-02-20

Included Journals:EI

Co-author:孟凯,楼佩煌

First Author:杨金

Correspondence Author:张航瑛*

Pre One:Precise and efficient spectrally resolved interferometry for profile measurement Next One:Optimized overlay metrology based on polarization eigenstate of Mueller matrix