Language : English
张航瑛

Paper Publications

Efficient white light interferometry for wafer‑scale high aspect ratio structures

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Journal:Measurement

Indexed by:Journal paper

Document Code:3

Discipline:Engineering

Document Type:J

Volume:255

Page Number:117988.

Translation or Not:no

Date of Publication:2025-01-19

Included Journals:SCI

Co-author:Boyu Wang, et al.

First Author:Weihao Zhang

Correspondence Author:Hangying Zhang*