Composition, microstructure, and mechanical properties of Y2O3 films in post-deposition annealing

Affiliation of Author(s):材料科学与技术学院

Journal:MATERIALS LETTERS

Key Words:Y2O3 thin films Phase transformation Microstructure Mechanical properties

Abstract:A series of Y2O3 films was prepared through reactive magnetron sputtering and further annealed at 350 degrees C and 500 degrees C. Differential scanning calorimetry reveals that the physisorbed oxygen (O-delta) of the as-deposited films was desorbed to O-2 (g) from 268.8 to 336.5 degrees C, and the desorption quantity of O-delta was 22.6%. Grazing incidence Xray diffraction results showed that the films remained at a cubic phase (111) out-of-plane in all annealing states. Microphotographs revealed that the as-deposited films and the films annealed at 350 degrees C contained a regular columnar structural grain which almost disappeared in the films annealed at 500 degrees C. The Y2O3 films annealed at 350 degrees C exhibited excellent mechanical properties, elastic modulus (E-IT) of 280 GPa, and hardness (H-IT) of 12 GPa.

ISSN No.:0167-577X

Translation or Not:no

Date of Publication:2017-01-01

Co-author:Xu, Shangjun,Zhou Jintang,Fang, Chao

Correspondence Author:姚正军,周金堂,Yao Zhengjun

Date of Publication:2017-01-01