Current position: Home >> Scientific Research >> Patents

一种多炬等离子体喷射CVD法沉积超硬膜的装置

Hits:

Scope of patent:中国专利

School Sign:南京航空航天大学

Type of Patent:Utility models

State of Patent:无权

Application Number:CN201220165200.9

Service Invention or Not:no

Application Date:2012-04-18

Publication Date:2012-11-07

Authorization Date:2012-11-07

Document Type:DOCUMENTTYPE_ID139324

Pre One:一种金刚石膜生长设备的热丝及电极结构

Next One:高温高压法改善金刚石膜综合性能的方法