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一种CVD系统衬底的无电刷测温方法及装置

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Scope of patent:中国专利

School Sign:南京航空航天大学

Type of Patent:Invent

State of Patent:权力转移

Application Number:CN200610040862.2

Service Invention or Not:no

Application Date:2006-07-31

Publication Date:2007-01-03

Authorization Date:2009-08-05

Document Type:DOCUMENTTYPE_ID139324

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