Structural optimization of partially ring-electroded ZnO thin film resonator

Affiliation of Author(s):航空学院

Journal:Proc. Symp. Piezoelectricity, Acoust. Waves, Dev. Appl., SPAWDA

Abstract:A design of ring electrode deposited on a rectangular ZnO thin film is proposed in this paper to demonstrate the existence of a nearly uniform displacement distribution at the central part of this kind of resonators. A variational formulation constructed based on a scalar equation provides a theoretical basis for Ritz method in our analysis. The mode shapes of the fundamental thickness-stretch mode of this ring-electroded resonator are obtained. The structural parameters of the ring electrode are optimized in order to achieve a relatively flat vibration region, which guarantees a higher accuracy and repeatable measurement for sensing detection in an air or liquid environment. These results can provide a fundamental reference of the design and optimization of structural parameters of a high quality sensor. © 2017 IEEE.

Translation or Not:no

Date of Publication:2018-04-17

Co-author:赵梓楠,Qian Zhenghua

Correspondence Author:Wang Bin,Qian Zhenghua

Date of Publication:2018-04-17