Affiliation of Author(s):航空学院
Journal:ACTA MECHANICA SOLIDA SINICA
Key Words:FBARs Elastic electrode Waves propagation Dispersion curves Inertial electrode
Abstract:Wave propagation in a piezoelectric layered structure of a film bulk acoustic resonator (FBAR) is studied. The accurate results of dispersion relation are calculated using the proposed elastic electrode model for both electroded and unelectroded layered plates. The differences of calculated cut-off frequencies between the current elastic electrode model and the simplified inertial electrode model (often used in the quartz resonator analysis) are illustrated in detail, which shows that an elastic electrode model is indeed needed for the accurate analysis of FBAR. These results can be used as an accurate criterion to calibrate the 2-D theoretical model for a real finite-size structure of FBAR. (C) 2017 Published by Elsevier Ltd on behalf of Chinese Society of Theoretical and Applied Mechanics.
ISSN No.:0894-9166
Translation or Not:no
Date of Publication:2017-06-01
Co-author:朱峰,张雨杏,Qian Zhenghua
Correspondence Author:Wang Bin,Qian Zhenghua
Date of Publication:2017-06-01
MOBILE Version
