Production and annealing behavior of lattice damage in energetic Kr and Ne-ion implanted 6H–SiC
Release time:2024-12-31 Hits:
Journal:Nuclear Instruments & Methods in. Physics Research Section B-Beam Interactions with Materials and Atoms
Indexed by:Journal paper
Translation or Not:no
Included Journals:SCI
Correspondence Author:张崇宏
Date of Publication:2013-10-01