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所属单位：机电学院

发表刊物：PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY

关键字：Micro tool array Electrodes vibration Bubble behaviour Wire electrochemical micro machining

摘要：Micro structures and components are widely used in modern industries, and micro machining has therefore become a popular research topic. As micro tools are essential in micro machining, wire electro-chemical micro machining is introduced in the fabrication of micro tools in this paper, and micro square column tool arrays are fabricated using wire cathodes by two steps. In order to improve the machining efficiency and quality, an electrode vibration technique is used, and the effects of bubble behaviour on slit width homogeneity and edge radius are studied through simulations of the electric field. The influences of various machining parameters such as vibration conditions, electrical properties, electrolyte concentration and feedrate on the standard deviation of the slit width and on the value of the edge radius are investigated. In addition, the micro dimple array is fabricated using electrochemical micro machining by employing the micro square column tool array as the cathode. (C) 2016 Elsevier Inc. All rights reserved.

ISSN号：0141-6359

是否译文：否

发表时间：2017-01-01

合写作者：Xu, Kun,曾永彬,朱荻

通讯作者：李鹏同,曾永彬