Tool-based Micro Machining and Applications in MEMS
- Publisher:Springer (Kluwer Academic Publishers)
- Place of Publication:Boston
- Description of Publication:Leondes C.T. (ed) MEMS/NEMS Handbook: Techniques and Applications
- Type of Works:工具书
- Publication Design:Foreign (overseas) publishing house
- Classification of Disciplines:Engineering
- ISBN No.:978-0-387-24520-1
- Translated or Not:yes
- Co-author:F.Z. Fang, K. Liu, T.R. Kurfess and G.C. Lim
- Document Type:300008
- Page Number:第3卷63-125页
- Date of Publication:2006-07-18

