Surface texturing process chamber components
- Type of Patent:PCT or foreign applications
- State of Patent:Pending patent
- Application Number:19/311,957 US
- Number of Inventors:4
- Service Invention or Not:yes
- Patent Applicant:X.C. Wang, Y.C. Wan, K. Liu and H. Wu
- Publication Date:2025-08-27
- Application Date:2025-08-27

