南京航空航天大学主页平台管理系统 Liu Kui--Home-- A study on the etching characteristics of atmospheric pressure plasma for single-crystal silicon wafer

刘奎

Dr Liu Kui currently is a Distinguished Professor and PhD Supervisor at the College of Mechanical & Electrical Engineering, Nanjing University of Aeronautics and Astronautics (NUAA), China. He received his BEng and MEng degrees from NUAA in 1989 and 1996, and PhD degree from the National University of Singapore (NUS) in 2002. Before joining NUAA in 2025, he was a Principal Scientist at the ...Detials

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A study on the etching characteristics of atmospheric pressure plasma for single-crystal silicon wafer

Release time:2025-10-16 Hits:

Impact Factor:3.9
Journal:Vacuum
Indexed by:Journal paper
Document Code:110292
Discipline:Engineering
Document Type:J
Volume:190
Translation or Not:no
Included Journals:SCI
Co-author:W.J. Guo, L.M.M. Calija, P. Xu, K. Liu and A.S. Kumar
Date of Publication:2021-09-14

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