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刘奎

Dr Liu Kui currently is a Distinguished Professor and PhD Supervisor at the College of Mechanical & Electrical Engineering, Nanjing University of Aeronautics and Astronautics (NUAA), China. He received his BEng and MEng degrees from NUAA in 1989 and 1996, and PhD degree from the National University of Singapore (NUS) in 2002. Before joining NUAA in 2025, he was a Principal Scientist at the ...Detials

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Paper Publications Current position: Home > Scientific Research > Paper Publications

Nanometric ductile cutting characteristics of silicon wafer using single crystal diamond tools

Release time:2025-10-15  Hits:

  • Impact Factor:2.1
  • Journal:Journal of Vacuum Science & Technology B
  • Indexed by:Journal paper
  • Discipline:Engineering
  • Document Type:J
  • Volume:27
  • Issue:3
  • Page Number:1361-1366
  • Translation or Not:no
  • Included Journals:SCI
  • Date of Publication:2009-09-24
Pre One: Numerical and experimental analysis of the tool edge radius effect in micromachining of ferrous materials
Next One: Super polishing behavior investigation of stainless-steel optical lens molding inserts

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