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刘奎

Dr Liu Kui currently is a Distinguished Professor and PhD Supervisor at the College of Mechanical & Electrical Engineering, Nanjing University of Aeronautics and Astronautics (NUAA), China. He received his BEng and MEng degrees from NUAA in 1989 and 1996, and PhD degree from the National University of Singapore (NUS) in 2002. Before joining NUAA in 2025, he was a Principal Scientist at the ...Detials

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Paper Publications Current position: Home > Scientific Research > Paper Publications

Nano-precision measurement of diamond tool edge radius for wafer fabrication

Release time:2025-10-15  Hits:

  • Impact Factor:7.5
  • Journal:Journal of Materials Processing Technology
  • Indexed by:Journal paper
  • Discipline:Engineering
  • Document Type:J
  • Volume:140
  • Page Number:358-362
  • Translation or Not:no
  • Included Journals:SCI
  • Co-author:X.P. Li, M. Rahman, K. Liu, K.S. Neo and C.C. Chan
  • Date of Publication:2003-11-19
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