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个人信息Personal Information
教授 博士生导师
招生学科专业：
力学 -- 【招收博士、硕士研究生】 -- 航空学院
机械工程 -- 【招收博士、硕士研究生】 -- 航空学院
机械 -- 【招收博士、硕士研究生】 -- 航空学院
主要任职：Chang-Jiang Distinguished Professor
其他任职：IAAM Fellow; board member of Chinese Acoustical Society and member of its academic work committee, and deputy director of expert committees on electronic information materials and devices, and on Aerospace materials, Chinese national think tank for materials and devices.
性别：男
毕业院校：Tokyo Institute of Technology
学历：东京工业大学
学位：哲学博士学位
所在单位：Nanjing University of Aeronautics & Astronautics
办公地点：A18-1106
联系方式：ejhhu@nuaa.edu.cn; HP:18912946712 TEl:025-84891681
电子邮箱：
A high-performance structure for the bulk acoustic wave metal oxide semiconductor gas sensor
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所属单位：航空学院
发表刊物：SMART MATERIALS AND STRUCTURES
关键字：bulk acoustic wave miniaturization power consumption sensor
摘要：It is known that bulk acoustic wave (BAW) can increase the sensitivity of a metal oxide semiconductor gas sensor and decrease its lower detection limit by at least one order of magnitude. However, the structure of BAW metal oxide semiconductor gas sensors has been bulky and its energy efficiency has been low. In this work, a new structure to form BAW metal oxide semiconductor gas sensors is proposed and investigated. In the structure, the metal case which is usually used to protect the sensing resistor, is employed to excite the working ultrasonic-field. A piezoelectric ring is bonded onto the bottom of the metal case to serve as the vibration excitation source of the whole system. The structure not only makes the gas sensor system compact and miniaturized by reducing the volume and weight of vibration excitation unit by more than 99%, but also decreases power consumption of the ultrasonic transducer by more than 98% for the same ultrasonic effect. Meanwhile the ultrasonic system can enhance the sensing response of a commercialized SnO2 gas sensor by one order of magnitude.
ISSN号：0964-1726
是否译文：否
发表时间：2019-10-01
合写作者：Luo, Zhao,Tang, Qiang,Su, Songfei
通讯作者：胡俊辉